Tailoring nanoporous materials by atomic layer deposition
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2011/CS/C1CS15091J
Reference86 articles.
1. Atomic Layer Deposition: An Overview
2. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
3. Preparation of Ni/Al2O3 catalysts from vapor phase by atomic layer epitaxy
4. Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition
5. Deposition of a Titania Coating on Silica by Means of the Chemical Surface Coating
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