Atomic Layer Deposition of Noble Metals and Their Oxides
Author:
Affiliation:
1. Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki, P.O. Box 55, FI-00014 Helsinki, Finland
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm402221y
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1. Electrical Transport Properties of IrO2and RuO2
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