Influence of Additives on Alkaline Etching of Silicon(111)
Author:
Affiliation:
1. IMM Solid State Chemistry, Radboud University Nijmegen, Heyendaalseweg 135, 6525 AJ Nijmegen, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cg900137h
Reference32 articles.
1. Anisotropic Etching of Silicon
2. Anisotropy in the wet-etching of semiconductors
3. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
4. Anisotropy in the Anodic Oxidation of Silicon in KOH Solution
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