Anisotropic Etching of Silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1657233
Reference2 articles.
1. A Water-Amine-Complexing Agent System for Etching Silicon
2. Hillocks, Pits, and Etch Rate in Germanium Crystals
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