Anisotropy in the Anodic Oxidation of Silicon in KOH Solution
Author:
Affiliation:
1. Debye Institute, Utrecht University, P.O. Box 80000, 3508 TA, Utrecht, The Netherlands
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp052595w
Reference39 articles.
1. Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
2. A new contactless electrochemical etch-stop based on a gold/silicon/TMAH galvanic cell
3. Etch Stop Techniques for Micromachining
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