Comparison of the Thermal Stress Behavior of AlN Single Crystal Growth on AlN and SiC Seeds via the Physical Vapor Transport Method through Three-Dimensional Numerical Modeling and Simulation-Reference-Cited by-同舟云学术

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Comparison of the Thermal Stress Behavior of AlN Single Crystal Growth on AlN and SiC Seeds via the Physical Vapor Transport Method through Three-Dimensional Numerical Modeling and Simulation

Published:2021-04-02 Issue:5 Volume:21 Page:2653-2662
ISSN:1528-7483
Container-title:Crystal Growth & Design
language:en
Short-container-title:Crystal Growth & Design

Author:

Zhao Yinting¹^ORCID,Wang Qikun²,Zhang Gang¹,Huang Jiali²,Fu Danyang¹,Wu Jason²

Affiliation:

1. State Key Laboratory of Advanced Special Steel & Shanghai Key Laboratory of Advanced Ferrometallurgy & School of Materials Science and Engineering, Shanghai University, Shanghai 200444, China

2. Ultratrend Technologies, Inc., Room 518, Building 3, No. 503, Shunfeng Road, Yuhang District, Hangzhou City, Zhejiang Province 311199, China

Funder

National Natural Science Foundation of China

Zhejiang Province

Publisher

American Chemical Society (ACS)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.cgd.0c01511

Reference73 articles.

1. Growth and applications of Group III-nitrides

2. Thick AlN layers grown by HVPE

3. Low-pressure HVPE growth of crack-free thick AlN on a trench-patterned AlN template

4. Self-Separation of a Thick AlN Layer from a Sapphire Substrate via Interfacial Voids Formed by the Decomposition of Sapphire

5. Properties of the state of the art of bulk III–V nitride substrates and homoepitaxial layers

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1. Evolution of 2-inch AlN single crystal grown on SiC seed via PVT method;Vacuum;2024-08

2. Surface Control of AlN Single Crystal Growth on SiC Substrate;Crystal Growth & Design;2024-05-22

3. Evolution of 2-Inch Aln Single Crystal Grown on Sic Seed Via Pvt Method;2024

4. Structural Design Optimization of Physical Vapor Transport Furnace for Aluminum Nitride Crystal Growth via Modeling and Simulation;Industrial & Engineering Chemistry Research;2023-10-19

5. Analysis of residual thermal stress for AlN crystal growth by PVT;Vacuum;2023-08

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