Low-pressure HVPE growth of crack-free thick AlN on a trench-patterned AlN template
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference12 articles.
1. Band structure and fundamental optical transitions in wurtzite AlN
2. Seeded growth of AlN bulk single crystals by sublimation
3. Hydride vapor phase epitaxy of AlN: thermodynamic analysis of aluminum source and its application to growth
4. Properties of AlN Layers Grown on SiC Substrates in Wide Temperature Range by HVPE
5. AlN substrates: fabrication via vapor phase growth and characterization
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2. Fabrication of a freestanding AlN substrate via HVPE homoepitaxy on a PVT-AlN substrate;Semiconductor Science and Technology;2023-12-27
3. Growth kinetics and substrate stability during high-temperature molecular beam epitaxy of AlN nanowires;Nanotechnology;2023-09-01
4. Optical characterization of point defects on internal quantum efficiency in AlGaN quantum wells grown on face-to-face-annealed sputtered AlN templates;AIP Advances;2023-04-01
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