Structural Design Optimization of Physical Vapor Transport Furnace for Aluminum Nitride Crystal Growth via Modeling and Simulation-Reference-Cited by-同舟云学术

Structural Design Optimization of Physical Vapor Transport Furnace for Aluminum Nitride Crystal Growth via Modeling and Simulation

Published:2023-10-19 Issue:42 Volume:62 Page:17287-17296
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Chen Chengmin¹²³^ORCID,Ding Zhizhong⁴,Yu Ruixian³,Liu Guangxia¹²,Guo Meng⁵,Wang Guodong³,Zhong Hongjun⁵,Nandakumar Krishnaswamy⁴^ORCID,Zhang Lei³^ORCID

Affiliation:

1. Energy Institute, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250100, PR China

2. School of Energy and Power Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250100, PR China

3. State Key Lab of Crystal Materials, Shandong University, Jinan, 250100, PR China

4. Cain Department of Chemical Engineering, Louisiana State University, Baton Rouge, Louisiana 70803, United States

5. Jinan Key Laboratory of High Performance Industrial Software, Jinan Institute of Supercomputing Technology, Jinan 250100, China

Funder

Ministry of Science and Technology of the People's Republic of China

State Key Laboratory of Crystal Materials

Natural Science Foundation of Shandong Province

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.iecr.3c01207

Reference26 articles.

1. Comparison of the Thermal Stress Behavior of AlN Single Crystal Growth on AlN and SiC Seeds via the Physical Vapor Transport Method through Three-Dimensional Numerical Modeling and Simulation

2. Electromagnetic-thermal model of a millimeter-wave heat exchanger based on an AlN:Mo susceptor

3. Advanced electrical characterization of AlN/Si based heterogeneous junction for photonic applications

4. Growth of large sapphire crystals: Lessons learned

5. Numerical Simulation Study on the Front Shape and Thermal Stresses in Growing Multicrystalline Silicon Ingot: Process and Structural Design

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