1. Department of Applied
Physics, Korea University, 2511, Sejongro, Sejong, 339-700, Republic of Korea
2. Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology, 291 Daehakro, Yuseong-gu, Daejeon, 305-701, Republic of Korea
3. Advanced Vacuum and Clean Equipment Optimizer (AVACO), Woelam-dong, Dalseo-gu, Daegu, 1107, Republic of Korea