Improved Initial Growth Behavior of SrO and SrTiO3 Films Grown by Atomic Layer Deposition Using {Sr(demamp)(tmhd)}2 as Sr-Precursor

Author:

Lee Woongkyu1,Jeon Woojin1,An Cheol Hyun1,Chung Min Jung1,Kim Han Joon1,Eom Taeyong1,George Sheby Mary2,Park Bo Keun2,Han Jeong Hwan2,Kim Chang Gyoun2,Chung Taek-Mo2,Lee Sang Woon3,Hwang Cheol Seong1

Affiliation:

1. Department of Materials Science and Engineering and Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-742, Republic of Korea

2. Thin Film Materials Research Center, Korea Research Institute of Chemical Technology, P.O. Box 107, Yuseong, Daejeon 305-600, Republic of Korea

3. Department of Physics and Division of Energy Systems Research, Ajou University, Suwon, Gyeonggi-do 443-749, Republic of Korea

Funder

Ministry of Trade, Industry and Energy

Korea Semiconductor Research Consortium

Ministry of Science, ICT and Future Planning

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

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