Insight into Selective Surface Reactions of Dimethylamino-trimethylsilane for Area-Selective Deposition of Metal, Nitride, and Oxide
Author:
Affiliation:
1. Department of Chemistry, KU Leuven (University of Leuven), 3001 Leuven, Belgium
2. Imec, Kapeldreef 75, 3001 Leuven, Belgium
Funder
Electronic Components and Systems for European Leadership
Publisher
American Chemical Society (ACS)
Subject
Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpcc.9b11270
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