Raman Spectroscopy: A Unique Tool for the Study of Thin Films-Reference-Cited by-同舟云学术

Raman Spectroscopy: A Unique Tool for the Study of Thin Films

Published:2000 Issue: Volume:615 Page:
ISSN:0272-9172
Container-title:MRS Proceedings
language:en
Short-container-title:MRS Proc.

Author:

De Wolf Ingrid

Abstract

ABSTRACTIn this paper, the different applications of Raman spectroscopy for the study of thin films is briefly discussed, using examples from microelectronics. Special attention is given to the application of micro-Raman spectroscopy for the measurement of local stress in and near films.

Publisher

Springer Science and Business Media LLC

Subject

General Engineering

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