Controlling the Electrical Characteristics of ZrO2 /Al2 O3 /ZrO2 Capacitors by Adopting a Ru Top Electrode Grown via Atomic Layer Deposition-Reference-Cited by-同舟云学术

Controlling the Electrical Characteristics of ZrO2 /Al2 O3 /ZrO2 Capacitors by Adopting a Ru Top Electrode Grown via Atomic Layer Deposition

Published:2018-12-03 Issue:3 Volume:13 Page:1800454
ISSN:1862-6254
Container-title:physica status solidi (RRL) - Rapid Research Letters
language:en
Short-container-title:Phys. Status Solidi RRL

Author:

An Cheol Hyun¹,Lee Woongkyu¹²,Kim Sang Hyeon¹,Cho Cheol Jin¹³,Kim Dong-Gun¹,Kwon Dae Seon¹,Cho Seong Tak¹,Cha Soon Hyung¹,Lim Jun Il¹,Jeon Woojin⁴,Hwang Cheol Seong¹^ORCID

Affiliation:

1. Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University; Seoul 08826 Republic of Korea

2. Department of Materials Science and Engineering, Northwestern University; Evanston IL 60208 USA

3. Center for Electronic Materials, Korea Institute of Science and Technology; Seoul 20792 Republic of Korea

4. Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University; Yongin 17104 Republic of Korea

Funder

Ministry of Trade, Industry and Energy

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssr.201800454/fullpdf

Reference30 articles.