Large-Area, Nanometer-Scale Discrete Doping of Semiconductors via Block Copolymer Self-Assembly-Reference-Cited by-同舟云学术

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Large-Area, Nanometer-Scale Discrete Doping of Semiconductors via Block Copolymer Self-Assembly

Published:2015-09-22 Issue:18 Volume:2 Page:1500421
ISSN:2196-7350
Container-title:Advanced Materials Interfaces
language:en
Short-container-title:Adv. Mater. Interfaces

Author:

Popere Bhooshan C.¹,Russ Boris²,Heitsch Andrew T.³,Trefonas Peter⁴,Segalman Rachel A.¹

Affiliation:

1. Department of Chemical Engineering and Materials; University of California; Santa Barbara CA 93106 USA

2. Department of Chemical and Biomolecular Engineering; University of California; Berkeley CA 94720 USA

3. The Dow Chemical Company; 1776 Building, Lab B7-D Midland MI 48674 USA

4. Dow Electronic Materials; 455 Forest Street Marlborough MA 01752 USA

Funder

Materials Research Facilities Network

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/admi.201500421/fullpdf

Reference23 articles.

1. Silicon Device Scaling to the Sub-10-nm Regime

2. The drive to miniaturization

3. Enhancing semiconductor device performance using ordered dopant arrays

4. Controlled nanoscale doping of semiconductors via molecular monolayers

5. Wafer-Scale, Sub-5 nm Junction Formation by Monolayer Doping and Conventional Spike Annealing

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1. Mineral Interface Doping: Hydroxyapatite Deposited on Silicon to Trigger the Electronic Properties;Advanced Materials Interfaces;2024-09-12

2. Polymeric precision doping as an emerging technology for the downscaling of microelectronic devices: State of the art;European Polymer Journal;2024-03

3. Fabrication of Porous Heteroatom‐Doped Carbon Networks via Polymer‐Assisted Rapid Thermal Annealing;Advanced Functional Materials;2023-10-25

4. 3D to 2D perspectives - Traditional and new doping and metrology challenges at the nanoscale;Materials Science in Semiconductor Processing;2023-08

5. Recent advances and emerging opportunities in rapid thermal annealing (RTA) of polymers;Molecular Systems Design & Engineering;2023

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