Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference104 articles.
1. Ion-beam-induced amorphization and recrystallization in silicon
2. Point defects and dopant diffusion in silicon
3. Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon;Pichler,2004
4. CMOS Past, Present and Future;Simoen,2018
5. Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics;Duffy,2021
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献