Recent advances and emerging opportunities in rapid thermal annealing (RTA) of polymers-Reference-Cited by-同舟云学术

Recent advances and emerging opportunities in rapid thermal annealing (RTA) of polymers

Published:2023 Issue:6 Volume:8 Page:701-712
ISSN:2058-9689
Container-title:Molecular Systems Design & Engineering
language:en
Short-container-title:Mol. Syst. Des. Eng.

Author:

Katsumata Reika¹^ORCID,Senger Claire¹^ORCID,Pagaduan James Nicolas¹^ORCID

Affiliation:

1. Department of Polymer Science and Engineering, University of Massachusetts Amherst, Amherst, Massachusetts 01003, USA

Abstract

A classic technique in semiconductors but new to polymers, rapid thermal annealing (RTA) offers numerous opportunities in polymer processing.

Funder

University of Massachusetts Amherst

U.S. Department of Education

Federal Aviation Administration

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,Industrial and Manufacturing Engineering,Process Chemistry and Technology,Energy Engineering and Power Technology,Biomedical Engineering,Chemical Engineering (miscellaneous),Chemistry (miscellaneous)

Link

http://pubs.rsc.org/en/content/articlepdf/2023/ME/D2ME00283C

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5. The Expanding Role of Rapid Thermal Processing in CMOS Manufacturing

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