Investigation of block depth distribution in PS-b-PMMA block copolymer using ultra-low-energy cesium sputtering in ToF-SIMS
Author:
Affiliation:
1. CEA, LETI, MINATEC Campus; 17 rue des Martyrs, 38054 Grenoble Cedex 9 France
2. ARKEMA - Groupement de Recherches de Lacq; RN 117, BP34 64170 Lacq France
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
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