Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques-Reference-Cited by-同舟云学术

Development and Synchrotron-Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques

Published:2017-12-07 Issue:6 Volume:215 Page:1700866
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Dialameh Masoud¹²³⁴^ORCID,Ferrarese Lupi Federico¹,Hönicke Philipp⁵,Kayser Yves⁵,Beckhoff Burkhard⁵,Weimann Thomas⁶,Fleischmann Claudia³,Vandervorst Wilfried³⁴,Dubček Pavo⁷,Pivac Branko⁷,Perego Michele⁸,Seguini Gabriele⁸,De Leo Natascia¹,Boarino Luca¹

Affiliation:

1. Istituto Nazionale di Ricerca Metrologia (INRIM); Strada delle Cacce 91 10135 Turin Italy

2. Politecnico di Torino; Corso Duca degli Abruzzi, 24 10129 Turin Italy

3. IMEC; Kapeldreef 75 3001 Heverlee Belgium

4. Instituut voor Kern-en Stralingsfysica, KU Leuven; Celestijenlaan 200D 3001 Leuven Belgium

5. Physikalisch-Technische Bundesanstalt (PTB); Abbestr. 2-12 10587 Berlin Germany

6. Physikalisch-Technische Bundesanstalt (PTB); Bundesallee 100 38116 Braunschweig Germany

7. Institut Ruđ er Boš ković; Bijenič ka cesta 54 10000 Zagreb Croatia

8. Laboratorio MDM, IMM-CNR; Via C. Olivetti 2 20864 Agrate Brianza Italy

Funder

EMPIR programme

Participating States

European Union's Horizon 2020

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference32 articles.

1. Investigation of block depth distribution in PS-b-PMMA block copolymer using ultra-low-energy cesium sputtering in ToF-SIMS

2. ToF-SIMS Depth Profiling of Cells:z-Correction, 3D Imaging, and Sputter Rate of Individual NIH/3T3 Fibroblasts

3. SIMS quantification of Si1?xGex alloys using polyatomic secondary ions

4. Development of a high lateral resolution TOF-SIMS apparatus for single particle analysis

5. A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Developing Quantitative Nondestructive Characterization of Nanomaterials: A Case Study on Sequential Infiltration Synthesis of Block Copolymers;ACS Applied Polymer Materials;2023-03-01

2. Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples;Nanomaterials;2022-10-26

3. Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures;Small;2021-11-25

4. Recent Advances in Sequential Infiltration Synthesis (SIS) of Block Copolymers (BCPs);Nanomaterials;2021-04-13

5. Grazing Emission X‐Ray Fluorescence: Novel Concepts and Applications for Nano‐Analytics;physica status solidi (b);2020-11-03