A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance-Reference-Cited by-同舟云学术

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A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance

Published:2014-01 Issue: Volume:289 Page:407-416
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Kubicek Markus,Holzlechner Gerald,Opitz Alexander K.,Larisegger Silvia,Hutter Herbert,Fleig Jürgen

Funder

Austrian Science Fund (FWF)

Christian Doppler Laboratory of Ferroic Materials

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference42 articles.

1. Surface analysis by secondary ion mass spectrometry (SIMS);Benninghoven;Surf. Sci.,1994

2. Imaging with mass spectrometry;Pacholski;Chem. Rev.,1999

3. Imaging mass spectrometry;McDonnell;Mass Spectrom. Rev.,2007

4. SIMS imaging of the nanoworld: applications in science and technology;Senoner;J. Anal. Atom. Spectrom.,2012

5. Chemical-analysis of inorganic and organic-surfaces and thin-films by static time-of-flight secondary-ion mass-spectrometry (ToF-SIMS);Benninghoven;Angew. Chem. – Int. Ed. Eng.,1994

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