A Correlative ToF-SIMS/SPM Methodology for Probing 3D Devices
Author:
Affiliation:
1. IMEC, Kapeldreef 75, 3001 Leuven, Belgium
2. INRIM, Strada delle Cacce 91, 10135 Turin, Italy
3. Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium
Funder
Horizon 2020 Framework Programme
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.analchem.0c02406
Reference14 articles.
1. A novel ToF-SIMS operation mode for sub 100nm lateral resolution: Application and performance
2. Argon Cluster Ion Beams for Organic Depth Profiling: Results from a VAMAS Interlaboratory Study
3. ToF-SIMS Depth Profiling of Cells:z-Correction, 3D Imaging, and Sputter Rate of Individual NIH/3T3 Fibroblasts
4. Topographic Correction of 3D SIMS Images
5. Protocols for Three-Dimensional Molecular Imaging Using Mass Spectrometry
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