Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X‐ray photoelectron spectrometers (XPS)-Reference-Cited by-同舟云学术

Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X‐ray photoelectron spectrometers (XPS)

Published:2021-10-22 Issue: Volume: Page:
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf Interface Anal

Author:

Unger Wolfgang E. S.¹^ORCID,Senoner Mathias¹,Stockmann Jörg M.¹^ORCID,Fernandez Vincent²,Fairley Neal³,Passiu Cristiana⁴,Spencer Nicholas D.⁴,Rossi Antonella⁴⁵

Affiliation:

1. Surface Analysis & Interfacial Chemistry Bundesanstalt für Materialforschung und ‐prüfung (BAM) Berlin Germany

2. Service d'analyse de surface Institut des Matériaux Jean Rouxel (IMN) Nantes Cedex 3 France

3. Casa Software Ltd Teignmouth UK

4. Laboratory for Surface Science and Technology, Department of Materials ETH Zurich Zürich Switzerland

5. Dipartimento di Scienze Chimiche e Geologiche Università di Cagliari Monserrato (Cagliari) Italy

Funder

British Academy of Management

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/sia.7025

Reference24 articles.

1. Martin Seah: An extraordinary scientist and metrologist

2. Summary of ISO/TC 201 Technical Report: ISO/TR 19319: 2003—Surface chemical analysis—Auger electron spectroscopy and x-ray photoelectron spectroscopy—Determination of lateral resolution, analysis area and sample area viewed by the analyser

3. Summary of ISO/TC 201 Standard: XXX. ISO 18516: 2006-Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution

4. Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards

5. Imaging surface analysis: Lateral resolution and its relation to contrast and noise

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