Summary of ISO/TC 201 Standard: XXX. ISO 18516: 2006-Surface chemical analysis-Auger electron spectroscopy and X-ray photoelectron spectroscopy-Determination of lateral resolution
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.2771/fullpdf
Reference5 articles.
1. Minimum detectable dimension, resolving power and quantification of scanning Auger microscopy at high lateral resolution
2. Spatial resolution in X-ray photoelectron spectroscopy
3. ISO/TR 19 319:2003 Surface Chemical Analysis-Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy-Determination of Lateral Resolution, Analysis Area, and Sample Area Viewed by the Analyser
4. Summary of ISO/TC 201 Technical Report: ISO/TR 19319: 2003—Surface chemical analysis—Auger electron spectroscopy and x-ray photoelectron spectroscopy—Determination of lateral resolution, analysis area and sample area viewed by the analyser
5. Resolution parameters for model functions used in surface analysis
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1. Summary of ISO/TC 201 International Standard ISO 18516:2019 Surface chemical analysis—Determination of lateral resolution and sharpness in beam‐based methods with a range from nanometres to micrometres and its implementation for imaging laboratory X‐ray photoelectron spectrometers (XPS);Surface and Interface Analysis;2021-10-22
2. Summary of ISO/TC 201 Technical Report 23173—Surface chemical analysis—Electron spectroscopies—Measurement of the thickness and composition of nanoparticle coatings;Surface and Interface Analysis;2021-07-12
3. Summary of ISO/TC 201 Standard: ISO 22415—Surface chemical analysis—Secondary ion mass spectrometry—Method for determining yield volume in argon cluster sputter depth profiling of organic materials;Surface and Interface Analysis;2019-07-15
4. Practical guides for x-ray photoelectron spectroscopy: First steps in planning, conducting, and reporting XPS measurements;Journal of Vacuum Science & Technology A;2019-05
5. Importance of sample preparation on reliable surface characterisation of nano-objects: ISO standard 20579-4;Surface and Interface Analysis;2018-07-04
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