Lateral resolution of nanoscaled images delivered by surface-analytical instruments: application of the BAM-L200 certified reference material and related ISO standards

Author:

Senoner M.,Maaßdorf A.,Rooch H.,Österle W.,Malcher M.,Schmidt M.,Kollmer F.,Paul D.,Hodoroaba V.-D.,Rades S.,Unger W. E. S.

Publisher

Springer Science and Business Media LLC

Subject

Biochemistry,Analytical Chemistry

Reference26 articles.

1. Abbe E (1873) Arch Mikrosk Anat IX:412–468

2. ISO 22493:2008, Microbeam analysis—Scanning electron microscopy—Vocabulary.

3. ISO/TR 19319:2013, Surface chemical analysis– Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

4. Senoner M, Unger W (2013) Surf Interface Anal 45:1313–1316

5. Senoner M, Wirth T, Unger W (2010) J Anal At Spectrom 25:1440–1452

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