Investigation of β-Ga2O3 thin films grown on epi-GaN/sapphire(0001) substrates by low pressure MOCVD-Reference-Cited by-同舟云学术

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Investigation of β-Ga2O3 thin films grown on epi-GaN/sapphire(0001) substrates by low pressure MOCVD

Published:2021-04 Issue: Volume:859 Page:157810
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

Zhang Tao,Li Yifan,Zhang Yachao,Feng Qian,Ning Jing,Zhang Chunfu,Zhang Jincheng,Hao Yue

Funder

Fundamental Research Funds for the Central Universities

National Natural Science Foundation of China

National Key Research and Development Program of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference25 articles.

1. High-voltage field effect transistors with wide-bandgap β-Ga2O3 nanomembranes;Hwang;Appl. Phys. Lett.,2014

2. Highly preferred orientation of Ga2O3 ﬁlms sputtered on SiC substrates for deep UV photodetector application;Meng-Qiu;Appl. Surf. Sci.,2019

3. Investigation of growth characteristics, compositions, and properties of atomic layer deposited amorphous Zn-doped Ga2O3 films;Tao;Appl. Surf. Sci.,2019

4. Patterned Ga2O3 for current blocking and optical scattering in visible light-emitting diodes;Kim;Phys. Status Solidi,2016

5. A review of Ga2O3 materials, processing, and devices;Pearton;Appl. Phys. Rev.,2018

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1. The influence of deposition pressure on the physical properties of Ga2O3 films and the high responsivity self-powered DUV photodetector based on n-Ga2O3/CuO/p-GaN heterojunction;Optics & Laser Technology;2025-01

2. Advances and prospects in Ga2O3/GaN heterojunctions: From fabrication to high-performance devices;Materials Science in Semiconductor Processing;2025-01

3. Effect of growth temperature on properties of β-Ga2O3 films grown on AlN by low-pressure chemical vapor deposition;Journal of Luminescence;2024-10

4. Sputtering Growth of Nitrogen-doped Ga2O3 Films and Applications of Photodetectors;Sensors and Materials;2024-05-31

5. Surface chemical composition and HRTEM analysis of heteroepitaxial β-Ga2O3 films grown by MOCVD;Applied Surface Science;2024-04

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