ZrO2 film prepared by atomic layer deposition using less viscous cocktail CpZr[N(CH3)2]3/C7H8 precursor and ozone-Reference-Cited by-同舟云学术

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ZrO2 film prepared by atomic layer deposition using less viscous cocktail CpZr[N(CH3)2]3/C7H8 precursor and ozone

Published:2017-04 Issue: Volume:701 Page:310-315
ISSN:0925-8388
Container-title:Journal of Alloys and Compounds
language:en
Short-container-title:Journal of Alloys and Compounds

Author:

An Jong-Ki,Kim Jin-Tae,Kang Goru,Oh Nam Khen,Hahm Sung-Ho,Lee Geunsu,Park In-Sung,Yun Ju-Young^ORCID

Funder

Korea Research Institute of Standards

R&D Convergence Program of National Research Council of Science

Basic Science Research Program

Nano·Material Technology Development Program

National Research Foundation of Kore

Ministry of Science, ICT & Future Planning

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Mechanical Engineering,Mechanics of Materials

Reference37 articles.

1. Emerging Applications for High K Materials in VLSI Technology

2. Optical properties and structural characterization of bias sputtered ZrO2 films

3. Effects of boron incorporation on the structural, optical and electrical properties of sol–gel-derived ZrO2 gate dielectrics

4. Growth, dielectric properties, and memory device applications of ZrO2 thin films

5. New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating;Ceramics International;2024-08

2. New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition;Surfaces and Interfaces;2024-03

3. Toward Low-Thermal-Budget Hafnia-Based Ferroelectrics via Atomic Layer Deposition;ACS Applied Electronic Materials;2023-09-07

4. Reaction mechanism and film properties of the atomic layer deposition of ZrO2 thin films with a heteroleptic CpZr(N(CH3)2)3 precursor;Applied Surface Science;2023-07

5. Controllable biodegradation and enhanced osseointegration of ZrO2-nanofilm coated Zn-Li alloy: In vitro and in vivo studies;Acta Biomaterialia;2020-03

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