New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs

Published:2007-11 Issue:11-12 Volume:51 Page:1529-1533
ISSN:0038-1101
Container-title:Solid-State Electronics
language:en
Short-container-title:Solid-State Electronics

Author:

Cho Ho Jin,Kim Young Dae,Park Dong Su,Lee Euna,Park Cheol Hwan,Jang Jun Soo,Lee Keum Bum,Kim Hai Won,Ki Young Jong,Han Il Keun,Song Yong Wook

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. Phonons and lattice dielectric properties of zirconia;Zhao;Phys Rev B,2002

Cited by 97 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comparative study on the stability of ferroelectric polarization of HfZrO2 and AlScN thin films over the depolarization effect;Journal of Applied Physics;2024-07-09

2. Internal strain identification of seed-layered ZrO2, aluminum-, and yttrium-doped ZrO2 thin films via grazing incidence x-ray diffraction;Journal of Applied Physics;2024-07-01

3. Leakage current control of Y-HfO2 for dynamic random access memory applications via ZrO2 stacking;Ceramics International;2024-07

4. Enhanced TDDB-Reliability of Ultra-Thin Zirconia Capacitors Featuring Al-Doped Oxide Layers;IEEE Electron Device Letters;2024-06

5. CMOS-Compatible Low-T Processing Methods for HZO-based DRAM capacitors by E-field Cycling;2024 IEEE International Memory Workshop (IMW);2024-05-12

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP