Author:
Eickhoff M.,Möller H.,Kroetz G.,v. Berg J.,Ziermann R.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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3. R. Ziermann, J. v. Berg, E. Obermeier, M. Eickhoff, G. Kroetz, A high temperature pressure sensor with β-SiC piezoresistors on SOI substrates, Tech. Digest Int. Conf. on Solid-State Sensors and Actuators, Chicago, USA, 1997, p. 1411.
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