Investigating the advanced characteristics of SiC based piezoresistive pressure sensors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Mechanics of Materials,General Materials Science
Reference36 articles.
1. A critical review of smart manufacturing & Industry 4.0 maturity models: implications for small and medium-sized enterprises (SMEs)[J];Mittal;J. Manuf. Syst.,2018
2. Recent advances in wearable tactile sensors: materials, sensing mechanisms, and device performance[J];Yang;Mater. Sci. Eng. R Rep.,2017
3. Computer aided modelling and diaphragm design approach for high sensitivity silicon-on-insulator pressure sensors[J];Narayanaswamy;Measurement,2011
4. High temperature smart-cut SOI pressure sensor[J];Guo;Sens. Actuators A Phys.,2009
5. Polyimide sacrificial layer for SOI SG-MOSFET pressure sensor[J];Fernández-Bolaños;Microelectron. Eng.,2006
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Highly Sensitive and Flexible Capacitive Pressure Sensors Combined with Porous Structure and Hole Array Using Sacrificial Templates and Laser Ablation;Polymers;2024-08-21
2. Design and Numerical Simulation of Capacitive Pressure Sensor Based on Silicon Carbide;IEEE Sensors Journal;2023-12-15
3. Investigation of MEMS Piezoresistive Pressure Sensor with a Freely Supported Rectangular Silicon Carbide Diaphragm as a Primary Sensing Element for Altitudinal Applications;Silicon;2022-10-06
4. Simulation of Circular Shaped SiC Diaphragm based Pressure Sensor and Comparing Its Deflection Characteristics with Square Shaped Diaphragm for Improved Sensor Performance;Journal of Pharmaceutical Negative Results;2022-01-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3