Design and Fabrication of Indium Tin Oxide Based Thin Film Piezoresistive Pressure Sensor
Author:
Funder
Vision Group of Science and Technology
Publisher
Springer Science and Business Media LLC
Link
https://link.springer.com/content/pdf/10.1007/s40799-023-00695-5.pdf
Reference43 articles.
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4. Tougas IM, Amani M, Gregory OJ (2014) Metallic and ceramic thin film thermocouples for gas turbine engines. Sens (Switzerland) 13(11):15324–15347
5. Song P et al (2020) Recent progress of miniature MEMS pressure sensors. Micromachines 11(1):56
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