Analysis of low Z elements on Si wafer surfaces with undulator radiation induced total reflection X-ray fluorescence at the PTB beamline at BESSY II-Reference-Cited by-同舟云学术

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Analysis of low Z elements on Si wafer surfaces with undulator radiation induced total reflection X-ray fluorescence at the PTB beamline at BESSY II

Published:2003-12 Issue:12 Volume:58 Page:2113-2121
ISSN:0584-8547
Container-title:Spectrochimica Acta Part B: Atomic Spectroscopy
language:en
Short-container-title:Spectrochimica Acta Part B: Atomic Spectroscopy

Author:

Streli C.,Pepponi G.,Wobrauschek P.,Beckhoff B.,Ulm G.,Pahlke S.,Fabry L.,Ehmann Th.,Kanngießer B.,Malzer W.,Jark W.

Publisher

Elsevier BV

Subject

Spectroscopy,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference26 articles.

1. TXRF with synchrotron radiation Analysis of Ni on Si-wafer surfaces

2. Total reflection x‐ray fluorescence spectroscopy using synchrotron radiation for wafer surface trace impurity analysis (invited)

3. Total reflection X-ray fluorescence analysis of light elements with synchrotron radiation and special X-ray tubes

4. An industrial SR TXRF facility at ESRF

5. Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fundamental parameter model for quantification of total reflection X-ray fluorescence analysis;Spectrochimica Acta Part B: Atomic Spectroscopy;2019-06

2. Analysis of organic multilayer structures using a combined grazing incidence X-ray fluorescence/X-ray reflectometry approach;Spectrochimica Acta Part B: Atomic Spectroscopy;2018-10

3. Dual energy-band excitation from a low power Rh anode X-ray tube for the simultaneous determination of low Z and high Z elements (Na-U) using total-reflection X-ray fluorescence analysis (TXRF);Review of Scientific Instruments;2018-09

4. Comparison of different excitation modes for the analysis of light elements with a TXRF vacuum chamber;Powder Diffraction;2015-05-22

5. Trends and Future Prospects;Total-Reflection X-Ray Fluorescence Analysis and Related Methods;2014-12-19

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