Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces

Author:

Pianetta P,Baur K,Singh A,Brennan S,Kerner Jonathan,Werho D,Wang J

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Metrology Roadmap: A Supplement to the National Technology Roadmap for Semiconductors;Diebold,1995

2. Total reflection x‐ray fluorescence spectroscopy using synchrotron radiation for wafer surface trace impurity analysis (invited)

3. Wide band-pass approaches to total-reflection X-ray fluorescence using synchrotron radiation

4. S. Brennan, P. Pianetta, S. Ghosh, N. Takaura, C. Wiemer, A. Fischer-Colbrie, S. Laderman, A. Shimazaki, A. Waldhauer, M.A. Zaitz, in Application of Synchrotron Radiation Techniques to Materials Science IV 542, in: S.M. Mini, D.L. Perry, S.R. Stock, L.J. Terminello, (Eds.), MRS, Boston, 1998.

5. M.C. Madden, D.C. Wherry, P. Pianetta, S. Brennan, in Applications of Synchrotron Radiation Techniques to Materials Science 307, in: D.L. Perry, N.D. Shinn, R.L. Stockbauer, K.L. D'Amico, L.J. Terminello, (Eds.), Materials Research Society, Boston, 1993, p. 125.

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