Surface pretreatment and deposition temperature dependence of MgO epitaxy on GaN by thermal atomic layer deposition-Reference-Cited by-同舟云学术

Surface pretreatment and deposition temperature dependence of MgO epitaxy on GaN by thermal atomic layer deposition

Published:2020-04 Issue: Volume:536 Page:125568
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Goodrich Justin C.,Farinha Thomas G.,Ju Ling,Howzen Alexandra J.,Kundu Animesh,Ogidi-Ekoko Onoriode N.,Wierer Jonathan J.,Tansu Nelson,Strandwitz Nicholas C.

Funder

U.S. Department of Education

U.S. National Science Foundation

Lehigh Accelerator Program

Patricia M. Smith Endowed

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

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