Effect of substrate temperature on growth mechanism and properties of PEALD-MgO dielectric films for amorphous-IGZO TFTs

Author:

Su Zhan-Bo,Zhang Xiao-Ying,Lin Xiao,Li Xiao-Long,Quan Cheng-Xiang,Hsu Chia-Hsun,Gao Peng,Wu Wan-Yu,Wuu Dong-Sing,Lai Feng-Min,Lien Shui-Yang

Publisher

Elsevier BV

Reference39 articles.

1. Structure and substructure properties of magnesium oxide thin films;Diachenko,2015

2. Characterization of MgO thin film prepared by spray pyrolysis technique using perfume atomizer;Visweswaran;J. Mater. Sci. Mater. Electron.,2020

3. Different oxygen migration behaviors at CoFe/MgO and CoFe/HfO2 interfaces and their effects on the magnetic anisotropy;Feng;AIP Adv.,2022

4. MgO/ZnO microsphere bilayer structure towards enhancing the stability of the self-powered MAPbI3 perovskite photodetectors with high detectivity;Yang;Appl. Surf. Sci.,2020

5. Transparent MgO for back-contact passivation of CdTe-based solar cells;Pandey,2021

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