Toolbox for atomic layer deposition process development on high surface area powders-Reference-Cited by-同舟云学术

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Toolbox for atomic layer deposition process development on high surface area powders

Published:2021-02-01 Issue:2 Volume:92 Page:025115
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Knemeyer K.¹^ORCID,Baumgarten R.¹^ORCID,Ingale P.¹^ORCID,Naumann d’Alnoncourt R.¹^ORCID,Driess M.¹²^ORCID,Rosowski F.¹³

Affiliation:

1. BasCat—UniCat BASF JointLab, Technische Universität Berlin, Hardenbergstraße 36, 10623 Berlin, Germany

2. Institut für Chemie, Technische Universität Berlin, Straße des 17. Juni 135, 10623 Berlin, Germany

3. Process Research and Chemical Engineering, BASF SE, Carl-Bosch-Straße 38, 67056 Ludwigshafen, Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

AIP Publishing

Subject

Instrumentation

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0037844

Reference87 articles.

1. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

2. Atomic Layer Deposition: An Overview

3. Catalyst Design with Atomic Layer Deposition

4. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges

5. History of atomic layer deposition and its relationship with the American Vacuum Society

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simulation of Nanoparticle Agglomerate Fluidization Based on Continuum Theory of Cohesive Particles;Industrial & Engineering Chemistry Research;2024-04-11

2. Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air;Chemistry of Materials;2023-09-29

3. The Catalytic Function of Phosphorus Enriched on the Surface of Vanadium‐based Catalysts in Selective Oxidations;ChemCatChem;2023-09-18

4. Tuning catalysis by surface-deposition of elements on oxidation catalysts via atomic layer deposition;Catalysis Science & Technology;2023

5. Synthesis of High Surface Area—Group 13—Metal Oxides via Atomic Layer Deposition on Mesoporous Silica;Nanomaterials;2022-04-25

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