Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages-Reference-Cited by-同舟云学术

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Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

Published:2017-06 Issue: Volume:103 Page:157-164
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Lee ChaBum,Jeon Seongkyul,Stepanick Christopher K.,Zolfaghari Abolfazl,Tarbutton Joshua A.

Funder

National Science Foundation

Center for Manufacturing Research,

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference34 articles.

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2. Nanometre resolution metrolology with the molecular measuring machine;Kramar;Meas. Sci. Tech.,2005

3. Modified atomic force microscope for high-rate dynamic force spectroscopy;Ptak;Appl. Phys. Lett.,2006

4. Design and construction of a single unit multi-functional optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage;Lee;Meas. Sci. Technol.,2011

5. Uncertainty Investigation of Grating Interferometry in Six-degree-of-freedom Motion Error Measurements;Lee;Int. J. Precis. Eng. Manuf.,2012

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