Enhancement of knife-edge interferometry for edge topography characterization
Author:
Affiliation:
1. J. Mike Walker ’66 Department of Mechanical Engineering, Texas A&M University, 3123 TAMU, College Station, Texas 77843-3123, USA
Funder
National Science Foundation
Publisher
AIP Publishing
Subject
Instrumentation
Link
https://aip.scitation.org/doi/am-pdf/10.1063/5.0063419
Reference15 articles.
1. Femtosecond laser pulses for surface-profile metrology
2. Application of Clustering Filter for Noise and Outlier Suppression in Optical Measurement of Structured Surfaces
3. Improvement in the volume determination for Si spheres with an optical interferometer
4. Dimensional metrology with X-ray CT: A comparison with CMM measurements on internal features and compliant structures
5. Knife-edge interferometry for cutting tool wear monitoring
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3. Hole Edge Metrology and Inspection by Edge Diffractometry;Journal of Manufacturing Science and Engineering;2024-04-29
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