Design and construction of a single unit multi-function optical encoder for a six-degree-of-freedom motion error measurement in an ultraprecision linear stage
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference18 articles.
1. Detection of three-axis angles by an optical sensor
2. Nano Positioning of a High Power Ultrasonic Linear Motor
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4. Effect of thermal deformation on machine tool slide guide motion
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