Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe
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Published:2023-12-10
Issue:12
Volume:14
Page:2221
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ISSN:2072-666X
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Container-title:Micromachines
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language:en
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Short-container-title:Micromachines
Author:
Yu Liang1ORCID, Feng Xingyang1, Hu Pengcheng1ORCID, Lin Xionglei1ORCID, Jing Tao1
Affiliation:
1. Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin 150080, China
Abstract
The development of high-precision satellites has increased the demand for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements for detecting structural deformation. The required instrument should simultaneously measure pitch, yaw, and roll angles using a single reference point. This paper proposes a 3-DOF angle measurement method based on the wavefront interference principle, and a mathematical model and its decoupling algorithm were built. Then, an angle-sensing probe with an extremely simple structure was designed and constructed. Finally, a series of experiments were performed to verify the method’s feasibility. The experiment results showed that the roll, pitch, and yaw measurement resolution of the probe was better than 10, 1, and 1 μrad, respectively, providing a high-performance 3-DOF angle measurement with a single probe. The short-term stabilities of roll, pitch, and yaw were better than 22, 1.7, and 2.0 μrad, respectively.
Funder
National Natural Science Foundation of China Natural Science Foundation of Heilongjiang Province Fundamental Research Funds for the Central Universities
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
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