RBS-channeling determination of damage profiles in fully relaxed Si0.76Ge0.24 implanted with 2 MeV Si ions

Author:

Bianconi M.,Lulli G.,Spallacci F.,Albertazzi E.,Nipoti R.,Carnera A.,Cellini C.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. He beam annealing and self-healing of Kr implanted BaWO4 at low temperature;Journal of Applied Physics;2021-04-28

2. Mechanisms of ion-induced GaN thin layer splitting;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2009-05

3. Differences in channelling of H-0 and H+ in Si single crystal;Czechoslovak Journal of Physics;2003

4. Channelling of H0and H+in Si Single Crystal;Acta Physica Polonica A;2002-12

5. Determination of He electronic energy loss in crystalline Si by Monte-Carlo simulation of Rutherford backscattering–channeling spectra;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-09

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