Thin-film boron-doped polycrystalline silicon70%-germanium30% for thermopiles-Reference-Cited by-同舟云学术

Thin-film boron-doped polycrystalline silicon70%-germanium30% for thermopiles

Published:1996-05 Issue:1-3 Volume:53 Page:325-329
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Van Gerwen P,Slater T,Chévrier J.B,Baert K,Mertens R

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

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2. CMOS vacuum sensors and other applications of CMOS thermophiles;Baltes,1993

3. Miniaturisierte thermische Strahlungssensoren: Die neuer Thermosaule TS-50.1;Elbel;Feingeratetechnik,1985

4. Thermoelectric Materials and Devices;Cadoff,1960

5. Determination of the thermal conductivity of CMOS IC polysilicon;Paul;Sensors and Actuators A,1994

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