Single (111)-Wafer Single-Side Microfabrication of Suspended p<sup>+</sup>Si/n<sup>+</sup>Si Thermopile for Tiny-Size and High-Sensitivity Thermal Gas Flow Sensors-Reference-Cited by-同舟云学术

Single (111)-Wafer Single-Side Microfabrication of Suspended p⁺Si/n⁺Si Thermopile for Tiny-Size and High-Sensitivity Thermal Gas Flow Sensors

Published:2023-03-15 Issue:6 Volume:23 Page:5628-5636
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Zhang Peng¹^ORCID,Huang Tao¹,Wang Jiachou¹^ORCID,Li Xinxin¹^ORCID

Affiliation:

1. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China

Funder

National Science Foundation of China

Innovation Team and Talents Cultivation Program of the National Administration of Traditional Chinese Medicine

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/10068826/10042242.pdf?arnumber=10042242

Reference21 articles.

1. Sensitivity improvement of PSi/Au thermopile-based gas flow sensor by optimizing heat-sink and thermal-insulation configuration;wang;Proc IEEE 33rd Int Conf Micro Electro Mech Syst (MEMS),2020

2. Package-friendly piezoresistive pressure sensors with on-chip integrated packaging-stress-suppressed suspension (PS3) technology

3. Minimum Detectable Air Velocity by Thermal Flow Sensors

4. Micromachined Thermal Flow Sensors—A Review

5. A single chip, double channel thermal flow meter

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