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Minimum Detectable Air Velocity by Thermal Flow Sensors

  • Published:2013-08-19 Issue:8 Volume:13 Page:10944-10953
  • ISSN:1424-8220
  • Container-title:Sensors
  • language:en
  • Short-container-title:Sensors

Author:

Issa Safir,Lang Walter

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference19 articles.

1. Micromachined thermal flow sensors—A review;Kuo;Micromachines,2012

2. Micromachined flow sensors in biomedical applications;Silvestri;Micromachines,2012

3. JCGM 200: 2008—International Vocabulary of Metrology Basic and General Concepts and Associated Terms (VIM),2008

4. Fundamentals of Heat and Mass Transfer;Incropera,2002

5. Heat transport from a chip;Lang;IEEE Trans. Electron. Devices,1990

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1. Flexible calorimetric flow sensor with unprecedented sensitivity and directional resolution for multiple flight parameter detection;Nature Communications;2024-04-10

2. Single (111)-Wafer Single-Side Microfabrication of Suspended p+Si/n+Si Thermopile for Tiny-Size and High-Sensitivity Thermal Gas Flow Sensors;IEEE Sensors Journal;2023-03-15

3. A Thermal Airflow Sensor Based on Mn-Co-Ni-O Thin Film;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

4. Bidirectional CMOS-MEMS Airflow Sensor With Sub-mW Power Consumption and High Sensitivity;IEEE Transactions on Industrial Electronics;2022-03

5. A Zero Offset Reduction Method for RTD-based Thermal Flow Sensors;2021 IEEE International Instrumentation and Measurement Technology Conference (I2MTC);2021-05-17
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