Materials Aspects of Micro- and Nanoelectromechanical Systems
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Publisher
Springer Berlin Heidelberg
Link
http://link.springer.com/content/pdf/10.1007/978-3-662-54357-3_7
Reference154 articles.
1. C.S. Smith: Piezoresistive effect in germanium and silicon, Phys. Rev. 94, 1–10 (1954)
2. A.N. Cleland, M.L. Roukes: Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals, Appl. Phys. Lett. 69, 2653–2655 (1996)
3. D.W. Carr, H.G. Craighead: Fabrication of nanoelectromechanical systems in single-crystal silicon using silicon on insulator substrates and electron beam lithography, J. Vacuum Sci. Technol. B 15, 2760–2763 (1997)
4. T. Kamins: Polycrystalline Silicon for Integrated Circuits and Displays, 2nd edn. (Kluwer Academic, Boston 1988)
5. J.J. McMahon, J.M. Melzak, C.A. Zorman, J. Chung, M. Mehregany: Deposition and characterization of in-situ boron doped polycrystalline silicon films for microelectromechanical systems applications, Mater. Res. Symp. Proc. 605, 31–36 (2000)
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