Determination of the thermal conductivity of CMOS IC polysilicon-Reference-Cited by-同舟云学术

Determination of the thermal conductivity of CMOS IC polysilicon

Published:1994-04 Issue:1-3 Volume:41 Page:161-164
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Paul O.M.,Korvink J.,Baltes H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. CMOS vacuum sensors and other applications of CMOS thermopiles;Baltes;Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan,7101993

2. Improved thermoelectric infrared sensor using double poly CMOS technology;Lenggenhager;Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan,7101993

3. Thermal conductivity of heavily doped LPCVD polycrystalline silicon films;Tai;J. Appl. Phys.,1988

4. A microstructure for measurement of thermal conductivity of polysilicon thin films;Völklein;J. Microelectromech. Syst.,1993

5. Measuring thermogalvanomagnetic properties of polysilicon for the optimization of CMOS sensors;Paul;Tech. Digest, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan,7101993

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