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A comparative study on energy performance assessment for HVAC systems in high-tech fabs

  • Published:2021-07 Issue: Volume:39 Page:102188
  • ISSN:2352-7102
  • Container-title:Journal of Building Engineering
  • language:en
  • Short-container-title:Journal of Building Engineering

Author:

Zhao Yu,Li Nan,Tao Chenyang,Chen Qiong,Jiang Mengqi

Funder

Ministry of Science and Technology of the People's Republic of China

Publisher

Elsevier BV

Subject

Mechanics of Materials,Safety, Risk, Reliability and Quality,Building and Construction,Architecture,Civil and Structural Engineering

Reference17 articles.

1. Guidelines for Energy Saving in Clean Rooms and Controlled Environments [M];China National Standardization Administration,2018

2. Makeup air systems energy-saving opportunities;Brown;Build. Eng.,1990

3. A comparative study on energy consumption for HVAC systems of high-tech fabs;Hu;Appl. Therm. Eng.,2007

4. Saving energy in the make-up air unit (MAU) for semiconductor cleanrooms in subtropical areas;Tsao;Energy Build.,2008

5. Capturing energy-saving opportunities in make-up air systems for cleanrooms of high-technology fabrication plant in subtropical climate;Tsao;Energy Build.,2010
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