A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance-Reference-Cited by-同舟云学术

A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance

Published:2024-01 Issue: Volume:286 Page:129600
ISSN:0360-5442
Container-title:Energy
language:en
Short-container-title:Energy

Author:

Zhao Wenxuan,Li Hangxin,Wang Shengwei

Funder

Research Grants Council, University Grants Committee

Publisher

Elsevier BV

Subject

General Energy,Pollution,Mechanical Engineering,Building and Construction,Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Civil and Structural Engineering

Reference38 articles.

1. Cleanroom of the future: an assessment of heating, ventilation and air-conditioning energy savings potential in a semiconductor industry facility;Busch,1998

2. An estimate of energy use in laboratories, cleanrooms, and data centers in New York;Mathew,2008

3. 2019 Green data center white paper,2019

4. 2020 Annual research report of China building energy efficiency,2020

5. Performance and improvement of cleanroom environment control system related to cold-heat offset in clean semiconductor fabs;Yin;Energy Build,2020

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