Capturing energy-saving opportunities in make-up air systems for cleanrooms of high-technology fabrication plant in subtropical climate-Reference-Cited by-同舟云学术

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Capturing energy-saving opportunities in make-up air systems for cleanrooms of high-technology fabrication plant in subtropical climate

Published:2010-11 Issue:11 Volume:42 Page:2005-2013
ISSN:0378-7788
Container-title:Energy and Buildings
language:en
Short-container-title:Energy and Buildings

Author:

Tsao Jhy-Ming,Hu Shih-Cheng,Xu Tengfang,Chan David Y.L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Building and Construction,Civil and Structural Engineering

Reference14 articles.

1. Makeup air systems energy-saving opportunities;Brown;ASHRAE Transactions,1990

2. Energy saving in semiconductor fabs by out-air handling unit performance improvement;Suzuki,2000

3. Ultrasonic humidification: system integration, energy, and indoor air quality engineering issues;Mumma;ASHRAE Transactions,1997

4. Real heat recovery with air handling units;Roulet;Energy and Building,2001

5. Makeup air heat recovery saving energy in Labs;Bratholomew;ASHRAE Journal,2004

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1. Energy Consumption and Carbon Emission Reduction in HVAC System of a Dynamic Random Access Memory (DRAM) Semiconductor Fabrication Plant (fab);IEEE Transactions on Semiconductor Manufacturing;2024-05

2. A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance;Energy;2024-01

3. Energy performance and energy conservation technologies for high-tech cleanrooms: State of the art and future perspectives;Renewable and Sustainable Energy Reviews;2023-09

4. Assessment of Transient Response of Indoor Temperature and Energy Consumption in a Semiconductor Manufacturing Cleanroom Using Various Feedback Control Schemes;Transactions of the Korean Society of Mechanical Engineers - B;2023-05-31

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