1. An estimate of energy use in laboratories, cleanrooms, and data centers in New York;Mathew,2008
2. Cleanroom energy benchmarking in high-tech and biotech industries;Tschudi;Proceedings of American Council for an Energy-Efficient Economy (ACEEE) Summer Study on Energy Efficiency in Industry,2001
3. Cleanroom energy benchmarking results;Tschudi;American Society of Heating, Refrigerating and Air-Conditioning Engineers (ASHRAE) Transactions,2003
4. Performance evaluation of cleanroom environmental systems;Xu;J Instit Environ Sci Technol,2003
5. Social responsibility report. Taiwan semiconductor manufacturing company,2020