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A comparative study on energy consumption for HVAC systems of high-tech FABs

  • Published:2007-12 Issue:17-18 Volume:27 Page:2758-2766
  • ISSN:1359-4311
  • Container-title:Applied Thermal Engineering
  • language:en
  • Short-container-title:Applied Thermal Engineering

Author:

Hu Shih-Cheng,Tsao Jhy-Ming

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Energy Engineering and Power Technology

Reference7 articles.

1. Makeup air systems energy-saving opportunities;Brown;ASHRAE Trans.,1990

2. Fan efficiency vs. unit efficiency for FAB application;Hunt;ASHRAE Trans.,1990

3. Ultrasonic humidification: system integration, energy, and indoor air quality engineering issues;Mumma;ASHRAE Trans.,1997

4. HVAC systems for semiconductor clean rooms – Part 1: System components;Naughton;ASHRAE Trans.,1990

5. HVAC systems for semiconductor clean rooms – Part 2: Total system components;Naughton;ASHRAE Trans.,1990
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