Aluminum function in Al-doped HfGaO films deposited at low temperature
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference33 articles.
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4. Post-annealing effects on Si-doped Ga2O3 photodetectors grown by pulsed laser deposition;Jeong;J. Alloy. Compd.,2021
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1. Vertically Stacked Triple-Bands Metal-Semiconductor-Metal Structured-Whole Ultraviolet Photodetectors;IEEE Sensors Journal;2024-08-01
2. Deep Ultraviolet C Phototransistors Using Aluminum-Doped Gallium Hafnium Oxide Channel Layer;IEEE Transactions on Electron Devices;2023-09
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